1、 Product Overview
The Gas Box process gas control box is a modular high-purity gas supply equipment specifically designed for high-end semiconductor processes, and is the core terminal unit of precision gas delivery systems. The product is developed for precision process scenarios such as etching and thin film deposition. It integrates gas pressure regulation, precision proportioning, high-purity filtration, safety interlock protection, and data communication functions, and can achieve continuous and stable supply of multiple special process gases.
2、 Core functions
1. High precision process gas control
Supporting independent closed-loop control of multiple process gases, it can accurately regulate gas supply pressure, flow rate, timing, and gas ratio, and adapt to the dynamic switching requirements of complex processes. Equipped with a dedicated blowing and ventilation system, it can quickly replace residual gas in the pipeline, prevent cross contamination of the gas path, and greatly improve process stability and yield.
2. Ultra high purity clean gas supply system
Adopting a low dead volume and no dead corners professional gas path structure, coupled with high-end high-purity filtration components, it effectively intercepts micro particle impurities and ensures no medium precipitation throughout the process. The whole machine strictly follows the UHP ultra-high purity gas supply standard, meeting the stringent requirements of high-end semiconductor clean processes.
3. Comprehensive security protection mechanism
The equipment adopts a sealed negative pressure box structure, combined with a forced exhaust system, which can quickly handle trace gas leaks and prevent harmful gas from escaping. Standard box door interlock, high and low pressure overload protection, and gas backflow prevention structure, which can automatically cut off the gas source under abnormal working conditions. The whole machine complies with SEMI S6 international safety standards and can be adapted to work with flammable, toxic, and corrosive special gases such as silane, chlorine, and fluorine.
4. Standardized intelligent communication docking
Reserved industrial standard communication interface, real-time collection and upload of core operating data such as pressure and flow, supporting local monitoring and remote operation and maintenance, seamlessly integrating with equipment PLC control system and factory automation management system.
3、 Standard Core Configuration
1. Box structure
Adopting high-strength anti-corrosion sealed shell, it can be equipped with explosion-proof transparent observation window, safety locking door body and dedicated exhaust interface. Supports multiple installation forms such as embedded and floor standing, with a compact structure, dust and corrosion resistance, and is suitable for integrated installation scenarios of various precision equipment.
2. Core gas circuit components (equipped with IGS valve combination)
The core gas circuit is equipped with an IGS integrated professional valve combination, which integrates process valves, purge valves, globe valves, and one-way check valve modules. It has the advantages of fast response speed, excellent sealing performance, strong corrosion resistance, and stable service life, and is suitable for long-term continuous working conditions of various special gases. Equipped with high-precision pressure regulating valves, precision pressure gauges, MFC mass flow controllers, and partial pressure monitoring sampling ports; The gas path adopts EP grade 316L stainless steel electro polished seamless pipeline, matched with a new sealing structure, and equipped with high-purity precision filters. The whole machine undergoes strict helium inspection, with an external leakage rate of ≤ 1.0 × 10 ⁻¹¹ mbar · L/s, ensuring ultra-high airtightness level.
3. Electrical safety configuration
Standard box door safety interlock switch, high and low pressure emergency cut-off protection, integrated pneumatic automatic control circuit, real-time monitoring of gas path operation status throughout the process, construction of multiple safety protection barriers, and avoidance of process safety risks.
4. Optional extension configuration
Support customization of multiple independent blowing pipelines, explosion-proof electrical components, combustible/toxic gas detection modules, and sound and light alarm systems; Expandable 485/Ethernet data acquisition function, compatible with factory MES intelligent manufacturing system, supporting non-standard modular customization and equipment OEM matching.
4、 Core advantages of the product
High precision process stability control
Optimized fluid and gas path design, extremely low dead chamber structure, precise gas ratio, high operational repeatability, effectively reducing process fluctuations and product defect rates;
Ultra high purity airtight rating
Full range UHP ultra-high purity pipe fittings configuration, metal hard seal without leakage or precipitation, suitable for 8-12 inch high-end wafer production lines;
Standardized safety system
Triple protection of negative pressure exhaust, hardware interlocking, and leakage monitoring, fully in line with the safety regulations of clean workshops;
Highly adaptable modular design
Customized layout can be made according to the number of gas paths, gas media, and installation space, to meet the matching needs of precision process equipment in multiple industries.
5、 Applicable industries
Widely used in semiconductor etching equipment, PVD/CVD thin film deposition equipment, photovoltaic coating equipment, optical coating equipment, microelectronic plasma process equipment and other semiconductor precision manufacturing fields, suitable for various high-end precision gas-phase process production scenarios.