The equipment uses a touch screen as the human-machine interface, uses PLC to detect system-related pressure, weight, flow and other signals, and then drives the pneumatic valve through the solenoid valve to realize automatic opening and closing of the valve and safe supply of gas. The program includes various safety interlock functions and multiple alarm functions to achieve continuous safe operation and safety protection of the equipment. The system is equipped with operating passwords and alarm records to achieve process safety monitoring. The semi-automatic gas delivery rack is a supply system suitable for inert gases and flammable (in open environments), non-corrosive and non-toxic high-purity gases. Its basic functions include manual purging, automatic switching and automatic safety cut-off in emergency situations. .